MVC Industry Overview

Since our inception in 2002, Machine Vision Company LLC has been an integral solutions provider in the Semiconductor and Electronics industry. We have worked with leading firms on both R&D and practical machine vision solutions such as PCB inspection, end defects in a fiber bundle, and microscopic flow visualization.

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Vision Inspection System for Cylindrical Brushes used in Wafer Cleaning System

The Machine Vision System detects defects in a host of cylindrical brushes used to clean 300mm wafers. Tolerance defects in the brush’s length, diameter, nodule diameter, nodule height (via a laser displacement device), and runout are accurately measured to tolerances within 0.002”. This system replaces a mechanical solution that simply measured runout by using a dial indicator attached to a paddle.

MVC fully automated this inspection process by supplying a machine with linear and rotational stages to accurately move the camera and the brush. The operator simply inserts the brush into the machine and hits the start button to do a complete brush inspection (where each brush takes about 1 minute to inspect). Results from the inspection are collected in reports and also exported to an OPC server for easy access by engineering and historian applications. Images of defects found during the inspection process are archived for later viewing and analysis.

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Product Video

System & Vision Requirements

  • Inspection machine must have an up time of 99.9% or better.
  • Capable of measuring the following brush attributes using a single GigE camera and laser displacement system
    • Overall brush length
    • Multiple zones (typically left, center, right) of brush diameters at each nodule
    • Multiple zones of nodule diameter, nodule pitch, and nodule height (via laser)
    • Multiple zones of runout; accurate to 0.002”
  • Cycle time in the range of 1 minute (varies based upon brush size)
  • Recipes define the inspection criteria for each brush type (selected with a bar-code reader)
  • Manufactured for use in a clean room (i.e. 316 stainless steel)

Vision Technology

  • 5-megapixel GigE camera, with large telecentric lens with polarization
  • Keyence Laser Displacement measurement system
  • Custom C# software
  • Smart vision lighting for both front-lit( polarized) and backlit (collimated) viewing
  • IAI PCON motors and motion controllers for the linear and rotary stages
  • Full safety interlocks in place to protect any entry into motion and laser regions

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